Integrated Vacuum Process Module
Industry
Semiconductor deposition and etch processes are performed within highly controlled process environments used to create or remove microscopic layers of material on semiconductor wafers. The equipment supporting these processes often combines precision vacuum technology, gas and fluid delivery, thermal management, electrical systems, and sophisticated process controls.
Description
Build-to-print manufacturing and integration of a high-level vacuum process module for use within advanced semiconductor processing equipment.
Services
- Supply Chain Management
- Precision Fabrication and Machining
- Vacuum Chamber Manufacturing
- Electromechanical Assembly
- Gas, Fluid, and Vacuum Integration
- Testing and Debug
Highlights
- Precision-machined and Welded Vacuum Chamber
- Integration of Vacuum Pumps, Valves, Gauges, and Plumbing
- Installation of Process Gas and Fluid-delivery Components
- Integration of Sensors, Actuators, Heaters, and Electrical Hardware
- Extensive Cable and Utility Routing Within a Compact Envelope
- Helium Leak & RGV Testing
- Cleanroom Assembly
- Standardized Manufacturing Processes for Repeat OEM Productiony